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Tel: 0551-63484895
After Sales: 4006082908
Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Special vacuum baking pan furnace for graphite plate
Product introduction: The vacuum baking pan furnace is a furnace used in conjunction with MOCVD equipment. The furnace is evacuated, the workpiece to be processed is placed in the furnace, and the cleaning gas heating reaction method is used for dry cleaning (cleaning gas: N2, H2 ). It is mainly used to effectively remove gallium nitride and aluminum nitride on the MOCVD susceptor (SiC coated graphite disk or quartz disk), which can achieve the purpose of effective cleaning and improve product quality.
Category：
Keywords: Semiconductor specific equipment
Description
(1) Product introduction: The vacuum baking pan furnace is a furnace used in conjunction with MOCVD equipment. The furnace is evacuated, the workpiece to be processed is placed in the furnace, and the cleaning gas heating reaction method is used for dry cleaning (cleaning gas: N2, H2 ). It is mainly used to effectively remove gallium nitride and aluminum nitride on the MOCVD susceptor (SiC coated graphite disk or quartz disk), which can achieve the purpose of effective cleaning and improve product quality.
(2)Technical parameters
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Operating temperature |
1450℃ |
maximum temperature |
1500℃ |
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insulation material |
Graphite fiber blanket, graphite paper |
muffle material |
SUS304 |
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Heating element |
Graphite heating rod |
cooling method |
Air cooling + circulating air cooling |
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Temperature control stability |
±2℃, with PID parameter self-tuning function |
Furnace temperature uniformity |
±5℃ (constant temperature 1550℃) |
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Temperature control thermocouple |
S graduation |
Maximum heating rate |
15℃/min (no load) |
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Temperature control points |
1 o'clock |
cooling rate |
1450℃ to 80℃, 240 minutes |
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Monitoring points |
1 o'clock |
ultimate vacuum |
10-3torr level |
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atmosphere |
Dry, clean, oil-free, high-purity nitrogen can be introduced into the furnace, with a purity of ≧99.999% |
Pumping rate |
Under no load, it reaches 10-2torr in 30 minutes. |
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Alarm protection |
Sound and light alarm protection for over-temperature, couple failure, gas outage, etc. |
Device color |
Computer camel gray |
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power supply |
Capacity greater than 160KVA, 3-phase 5-wire, 220/380VAC, 50Hz |
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Reference model |
MOLKP-518 |
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Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: TRUE P Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
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