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AboutA high-tech enterprise in the semiconductor equipment industry that focuses on thermal, vacuum, high-voltage and other equipment.
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Products
Contact us
Tel: 0551-63484895
After Sales: 4006082908
Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Fully automatic SIC composite membrane vertical furnace
This product is mainly facing the field of SIC power device manufacturing. In the nitrogen atmosphere, the SIC/PI composite film is carbonized at 600-1050 ° C. During the carbonization process, the SIC nanoparticles and PI effects form a chemical bond, so that their heat resistance is obtained improve.
Category：
Keywords: Semiconductor specific equipment
Description
Product Usage:
This product is mainly facing the field of SIC power device manufacturing. In the nitrogen atmosphere, the SIC/PI composite film is carbonized at 600-1050 ° C. During the carbonization process, the SIC nanoparticles and PI effects form a chemical bond, so that their heat resistance is obtained improve.
Features:
1. All -in -one man -machine operating system, continuous automation production, high work efficiency, saving labor costs, electrical energy and process time;
2. Fec heated, the temperature heating is rapid and uniform;
3. Quality stainless steel material, the surface is treated with physics and chemical polishing to ensure cleanliness;
4. Self -cleaning function -high temperature cleaning.
Technical Parameters:
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Handle product |
6/8inch Wafer |
Processing |
100PCS/Tube |
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Heaters |
Round FeC heating board |
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Premium |
2 |
Robotic |
1 |
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Temperature range |
Long -term use temperature: 950 ℃, the highest temperature: 1200 ℃ |
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Heating rate |
＜8℃/min |
Cooling rate |
＜7℃/min |
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Heating power |
30kW(Single furnace) |
Heating temperature |
3 |
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Uniformity of furnace temperature |
±2℃（950℃ constant temperature） |
Temperature control |
K -point |
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Temperature control method |
SSR |
Program control |
P.I.D control |
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Furnace material |
Quartz |
Insulation Materials |
Ceramic fiber |
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Atmosphere control |
Multi-road traffic meter regulating air intake: flow measurement program: 1) 0-150L/min nitrogen 2) 0-40L/min oxygen |
Atmosphere |
N2/O2 |
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Exhaust system |
Set up exhaust chimneys on the top for exhaust gas emissions, recycling |
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Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: TRUE P Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Copyright © 2023 Hefei TRUE P Technology Co., Ltd 丨 business license