-
AboutA high-tech enterprise in the semiconductor equipment industry that focuses on thermal, vacuum, high-voltage and other equipment.
-
ProductsWe have become a high-quality professional equipment supplier for multiple research centers and integrated circuit production.
-
NewsFollow TRUE P Technology and stay up-to-date with the latest information.
Products
Contact us
Tel: 0551-63484895
After Sales: 4006082908
Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Full automatic vertical annealing furnace
It is used for IC integrated circuits, MEMS, electrical electronic devices, optoelectronic devices and other fields. It is mainly suitable for the alloy and annealing of the wafer of 6 ", 8", and 12 "wafers.
Category：
Keywords: Semiconductor specific equipment
Description
Product Usage:
It is used for IC integrated circuits, MEMS, electrical electronic devices, optoelectronic devices and other fields. It is mainly suitable for the alloy and annealing of the wafer of 6 ", 8", and 12 "wafers.
The annealing is a process of getting into the inert gas (N2) under the low temperature conditions, eliminating the lattice defect and lattice damage of the silicon wafer interface, and optimizing the quality of the silicon wafer interface.
Features:
1. All -in -one man -machine operating system, continuous automation production, high work efficiency, saving labor costs, electrical energy and process time;
2. Fec heated, the temperature heating is rapid and uniform;
3. Quality stainless steel material, the surface is treated with physics and chemical polishing to ensure cleanliness;
|
Handle product |
6/8/12inch Wafer |
Processing |
100PCS/Tube |
|||
|
Heaters |
Round FeC heating board |
|||||
|
Premium |
2个 |
Robotic |
1 |
|||
|
Temperature range |
Long -term use temperature: 1050 ℃, the highest temperature: 1200 ℃ |
|||||
|
Heating rate |
＜10℃/min |
Cooling rate |
＜5℃/min |
|||
|
Uniformity of furnace temperature |
±℃（1050℃ Constant temperature） |
Heating temperature |
3 |
|||
|
Temperature control method |
SSR |
Program control |
P.I.D control |
|||
|
Furnace materia |
Quartz |
Insulation Materials |
Ceramic fiber |
|||
|
Atmosphere control |
Multi-road flowmeter regulates air intake, flow measurement program: 0-150L/min |
Atmosphere |
N2 |
|||
|
Exhaust system |
Set up exhaust chimneys on the top for exhaust gas emissions, recycling |
|||||
Related products
Message
Quick navigation
Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: TRUE P Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Copyright © 2023 Hefei TRUE P Technology Co., Ltd 丨 business license