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Atmosphere control mesh belt furnace
Atmosphere control mesh belt furnace
Category:
Keywords: Semiconductor specific equipment
Description
(1)Application fields:
1.1 Copper thick film firing
1.2 Metal oxidation
1.3 Metal brazing
1.4 Metal and glass sealing
1.5 Research on annealing of glass films
1.6 Other high temperature special atmosphere applications
(2) Features:
2.1 Precise air introduction
2.2 The heating element heats quickly and evenly
2.3 Reliable conveyor system adapts to a wide range of loading configurations
2.4HMI has built-in analysis, data and event logs
2.5 Can be customized to meet specific processing requirements
Specification |
Typical parameters |
Remark |
Maximum operating temperature (℃) |
1050 |
|
Atmosphere of use |
N2, H2, O2 and other atmosphere combinations |
|
optional controls |
Accurate oxygen content/dew point control/online detection of indicators |
|
Mesh belt width (mm) |
150-1000 |
Note 1 |
Belt speed range (mm/min) |
25-200 |
|
Temperature uniformity(℃) |
±2-5 |
Note 2 |
Control temperature zone |
4-13 |
|
cooling method |
Air convection/forced air cooling/water cooling |
|
Note 1: Typical mesh belt width is 250/350/500/650/915; |
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