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AboutA high-tech enterprise in the semiconductor equipment industry that focuses on thermal, vacuum, high-voltage and other equipment.
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ProductsWe have become a high-quality professional equipment supplier for multiple research centers and integrated circuit production.
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Contact us
Tel: 0551-63484895
After Sales: 4006082908
Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
Fully automatic vacuum vertical oven
Fully automatic vacuum vertical oven
Category：
Keywords: Semiconductor specific equipment
Description
(1) Product usage: used in semiconductor and pan-semiconductor processes such as low-temperature baking, drying, water removal, curing, and debinding in a vacuum environment.
(2) Product features:
2.1. Integrated human-machine operating system, continuous automated production, high work efficiency, saving labor costs, electricity and process time.
2.2. Ceramic fin heater, ring-shaped surrounding heating;
2.3 Ultimate vacuum degree: ≤10pa; optional (oxygen content index: ≤50ppm at normal temperature; ≤30ppm at high temperature)
(3)Technical parameters
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Handling products |
8/12inch wafer |
Throughput |
50PCS/tube 26PCS/tube |
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heater |
Ceramic fin heater, ring-shaped surrounding heating |
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Feeding port |
2/3/4 |
Manipulator |
1/2 |
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temperature range |
Long-term use temperature: 300℃, maximum temperature: 350℃ |
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Heating rate |
＜8℃/min |
cooling rate |
＜3℃/min |
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heating power |
13kW (single furnace) |
Heating temperature zone |
4 |
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Furnace temperature uniformity |
±2%℃ (200℃ constant temperature) |
Temperature control thermocouple |
K graduation |
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Temperature control method |
SSR |
Program control |
PID control |
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atmosphere control |
Multi-channel flow meter adjusts the inlet flow measurement range: 0-150L/min |
atmosphere |
N2 |
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Exhaust system |
Set up an exhaust chimney at the top for waste gas emission and recovery | |||
(4)Control system
*The human-machine interface adopts touch screen mode
*The core controller adopts embedded controller
*Over-temperature protection is an independent detection device
*With oxygen content detection function
*Motion control is servo/stepper control unit
*Transmission is a professional wafer transfer robot
*The software has functions: temperature control, atmosphere control, process editing, data recording, and chart display.
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Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China
Produce address: TRUE P Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China
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